2 August 2004 The study of fiber optic interferometer for the calibration of PZT travel distance
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Abstract
A fiber optic interferometer for a novel application is proposed in this paper. This new configuration and decoding scheme is in particular suitable for an AFM-tip tailoring system. A theoretical analysis method for simulating the relation of displacement and interfering intensity from the fiber optic sensor is thoroughly discussed. Experimental data for evaluating interfering efficiency agree well with simulation results. Higher resolution becomes achievable with the help of the two-channel interferometer decoding scheme. Moreover, the properties of the piezoelectric actuator used in this system are characterized by the optical sensor. This compact sensor exhibits satisfactory performance for the nanometer-resolution requirement of the developing AFM tip tailoring system.
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Kai-Yu Cheng, Jung-Tsung Chou, Hung-Ming Tai, Huang-Chi Huang, "The study of fiber optic interferometer for the calibration of PZT travel distance", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); doi: 10.1117/12.559235; https://doi.org/10.1117/12.559235
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