Investigations of large x-ray optics for free electron lasers

Michael Stormer; Audrey Liard-Cloup; Frank Felten; Sandra Jacobi; Barbara Steeg; Josef Feldhaus; Rudiger Bormann

doi:10.1117/12.559619

18 October 2004 Investigations of large x-ray optics for free electron lasers

Michael Stormer, Audrey Liard-Cloup, Frank Felten, Sandra Jacobi, Barbara Steeg, Josef Feldhaus, Rudiger Bormann

Proceedings Volume 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II; (2004) https://doi.org/10.1117/12.559619
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A free electron laser (FEL) is being set up at DESY (Deutsches Elektronen Synchrotron, Hamburg, Germany). In the current XUV range of the FEL, total-reflection X-ray mirrors are needed for beam guidance, beam alignment, and monochromatisation. Such X-ray optics are used at a grazing incidence angle of about 2°; thus a maximum length of about 500 mm is required. Due to the working range of the FEL (50 - 200 eV), carbon has been selected as a suitable material with an absorption edge at 284 eV. The amorphous carbon coatings were manufactured by magnetron sputtering in a special UHV system for large deposition at GKSS research centre (Geesthacht, Germany). The variation in film thickness over the whole length has been investigated by X-ray reflectometry (XRR). Good uniformity (better than 2 %) and low roughness (< 0.5 nm) have been observed.

Citation Download Citation

Michael Stormer, Audrey Liard-Cloup, Frank Felten, Sandra Jacobi, Barbara Steeg, Josef Feldhaus, and Rudiger Bormann "Investigations of large x-ray optics for free electron lasers", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); https://doi.org/10.1117/12.559619

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