18 October 2004 New multilayer coating for 30.4-nm radiation
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Abstract
A multilayer coating of Mo/Si is usually used as an EUV optics for space science, especially for He-II (30.4nm) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15-20% was achieved. But space science community will need higher reflective coating at 30.4 nm radiation for the future satellite missions. In this work, for developing new multilayer mirror of He-II radiations, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance with the monthly degradation under the atmosphere circumstance.
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Ichiro Yoshikawa, Ichiro Yoshikawa, Tetsunori Murachi, Tetsunori Murachi, "New multilayer coating for 30.4-nm radiation", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); doi: 10.1117/12.558976; https://doi.org/10.1117/12.558976
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