10 November 2004 High-resolution imaging system using a tabletop extreme ultraviolet source
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Abstract
We present a simple setup for obtaining high resolution, sub-micron images using high harmonic generation (HHG) in a hollow-core waveguide as a light source. We demonstrate imaging with illumination at a wavelength of 30 nm using an all-reflective, double-multilayer mirror setup and a CCD camera as a recording device. For the magnifications of up to 50x used here, the all-reflective setup has advantages over zone plate microscopes because of the much larger working distances that allow for imaging of plasmas. This setup has also a throughput that is higher by at least a factor of three compared to zone-plate microscopes, and presents the additional advantage of preserving the temporal pulse width of the harmonics because diffractive optics are not used. This work demonstrates the feasibility of high-spatial-resolution, time-resolved, EUV imaging of plasmas and other objects using a tabletop compact light source.
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Xiaoshi Zhang, Xiaoshi Zhang, Daisy Raymondson, Daisy Raymondson, Arvinder S. Sandhu, Arvinder S. Sandhu, Sterling Backus, Sterling Backus, Yanwei Liu, Yanwei Liu, David T. Attwood, David T. Attwood, Margaret M. Murnane, Margaret M. Murnane, Henry C. Kapteyn, Henry C. Kapteyn, Ariel R. Libertun, Ariel R. Libertun, } "High-resolution imaging system using a tabletop extreme ultraviolet source", Proc. SPIE 5534, Fourth Generation X-Ray Sources and Optics II, (10 November 2004); doi: 10.1117/12.557379; https://doi.org/10.1117/12.557379
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