26 October 2004 The evolution of hard x-ray tomography from the micrometer to the nanometer length scale
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Abstract
For several years efforts have been made to improve the resolution for imaging and tomography with hard X-rays. Recently we demonstrated sub-100 nm resolution at 13 keV with a microscope including a Kirkpatrick-Baez multilayer-mirror (KB) as a condenser followed by a micro-Fresnel Zone Plate (FZP) as an objective lens. We built since a new tomography station at UNICAT at the Advanced Photon Source integrating the KB-FZP microscope for 100 nm tomography.
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Christoph Rau, K. M. Peterson, P. R. Jemian, T. Terry, Michael T. Harris, Stefan Vogt, C.-P. Richter, U. Neuhausler, G. Schneider, Ian K. Robinson, "The evolution of hard x-ray tomography from the micrometer to the nanometer length scale", Proc. SPIE 5535, Developments in X-Ray Tomography IV, (26 October 2004); doi: 10.1117/12.559887; https://doi.org/10.1117/12.559887
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KEYWORDS
Tomography

Microscopes

Hard x-rays

Phase contrast

Zone plates

Mirrors

X-rays

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