Electron-based microfocus soft-x-ray source and applications

Andre Egbert; Boris Tkachenko; Stefan Becker; Boris N. Chichkov

doi:10.1117/12.554894

3 November 2004 Electron-based microfocus soft-x-ray source and applications

Andre Egbert, Boris Tkachenko, Stefan Becker, Boris N. Chichkov

Proceedings Volume 5537, X-Ray Sources and Optics; (2004) https://doi.org/10.1117/12.554894
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A compact electron-based microfocus EUV/soft-x-ray source for applications in metrology and microscopy is developed. The source concept is based on the transfer of advanced microfocus x-ray tube technology into the EUV/soft-x-ray spectral range. This allows the realization of a flexible, debris-free, and long-term stable source. Detailed characteristics of the source performance are reported and different applications of the soft-x-ray tube in the field of at-wavelength metrology are presented.

Citation Download Citation

Andre Egbert, Boris Tkachenko, Stefan Becker, and Boris N. Chichkov "Electron-based microfocus soft-x-ray source and applications", Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004); https://doi.org/10.1117/12.554894

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