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3 November 2004 Electron-based microfocus soft-x-ray source and applications
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A compact electron-based microfocus EUV/soft-x-ray source for applications in metrology and microscopy is developed. The source concept is based on the transfer of advanced microfocus x-ray tube technology into the EUV/soft-x-ray spectral range. This allows the realization of a flexible, debris-free, and long-term stable source. Detailed characteristics of the source performance are reported and different applications of the soft-x-ray tube in the field of at-wavelength metrology are presented.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andre Egbert, Boris Tkachenko, Stefan Becker, and Boris N. Chichkov "Electron-based microfocus soft-x-ray source and applications", Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004);


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