High spectral resolution Al2O3/B4C, SiC/Si, SiC/B4C, and SiC/C multilayer structures for the photon energies of 6 keV to 19 keV

Yuriy Y. Platonov; Vladimir V. Martynov; Alexander Kazimirov; Barry Lai

doi:10.1117/12.558740

3 November 2004 High spectral resolution Al₂O₃/B₄C, SiC/Si, SiC/B₄C, and SiC/C multilayer structures for the photon energies of 6 keV to 19 keV

Yuriy Y. Platonov, Vladimir V. Martynov, Alexander Kazimirov, Barry Lai

Author Affiliations +

Proceedings Volume 5537, X-Ray Sources and Optics; (2004) https://doi.org/10.1117/12.558740
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A double multilayer monochromator with each multilayer composed of four stripes with different d-spacing providing spectral resolution of 0.3% to 0.8% in the energy range of 6keV to 19keV has been developed. Test multilayer structures with d-spacing from 2.3nm to 10.6nm have been deposited by magnetron sputtering. X-ray characterization has been performed at OSMIC by using a recently upgraded diffractometer setup and Cu-K_α radiation and at the APS. The following material combinations were studied before the final choice of materials for the high energy resolution monochromator has been made: Al₂O₃/B₄C, SiC/Si, SiC/B₄C and SiC/C. To minimize the effect of internal stress built in multilayer structure on X-ray characteristics flat and thick 1" diameter silicon substrates supplied by Wave Precision Inc. were used for all calibration coatings. Final coatings were deposited on two 145mm long, 60mm wide and 30mm thick silicon substrates. Resolution of SiC/Si structures with d₁=2.3nm, N₁=1000 and d₂=3nm, N₂=700 was measured at Cu-K_α with X-ray beam divergence of 14 arcsec to be 0.216% and 0.34% respectively. For plane waves the resolution is expected to be 0.13% and 0.19%, respectively.

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Yuriy Y. Platonov, Vladimir V. Martynov, Alexander Kazimirov, and Barry Lai "High spectral resolution Al₂O₃/B₄C, SiC/Si, SiC/B₄C, and SiC/C multilayer structures for the photon energies of 6 keV to 19 keV", Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004); https://doi.org/10.1117/12.558740

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