3 November 2004 Layer intermixing in design and fabrication of double-gradient multilayers
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Abstract
Non periodic Ru/B4C double gradient multilayers were deposited by Distributed Electron Cyclotron Resonance (DECR) sputtering. These coatings will allow focusing with a constant reflectivity of 50% over an energy range from 12 keV to 14 keV. In this case, a lateral gradient is needed to fulfill the Bragg condition along the multilayer length, and a depth gradient is required to obtain the expected energy bandwidth. Our design approach was based on numerical calculations to define each layer thickness independently. During calibration tests, we had to take into account intermixing between Ru and B4C. We will present the importance of layer intermixing of each material (angular shift and bandwidth of first Bragg peak) and how these parameters can be integrated in the design without affecting the required reflectivity profile. We will also discuss compromises made to keep both lateral and depth gradient optimized in view of the technical limitations of our deposition process.
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Christine Borel, Christian Morawe, Jean-Christophe Peffen, "Layer intermixing in design and fabrication of double-gradient multilayers", Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004); doi: 10.1117/12.556773; https://doi.org/10.1117/12.556773
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