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14 October 2004 An assessment of yttrium optical constants EUV using Mo/Y multilayers designed as in the linear polarizers
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Abstract
We have produced and characterized Mo/Y multilayers designed as linear-polarizers for use near λ ~ 8 nm. By depositing these films directly onto silicon photodiodes, we are able to measure both reflectance and transmittance in the EUV using synchrotron radiation. These measurements have been used to access the accuracy of yttrium optical constants in this wavelength range. We describe our experimental results and discuss the prospects for the future development of efficient EUV polarization elements.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Benjawan Kjornrattanawanich, Regina Soufli, Sasa Bajt, David L. Windt, and John F. Seely "An assessment of yttrium optical constants EUV using Mo/Y multilayers designed as in the linear polarizers", Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); doi: 10.1117/12.560465; https://doi.org/10.1117/12.560465
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