Measurements of the optical constants of scandium in the 50-1300eV range

Andrew L. Aquila; Farhad Salmassi; Eric M. Gullikson; Fredrik Eriksson; Jens Birch

doi:10.1117/12.563615

14 October 2004 Measurements of the optical constants of scandium in the 50-1300eV range

Andrew L. Aquila, Farhad Salmassi, Eric M. Gullikson, Fredrik Eriksson, Jens Birch

Proceedings Volume 5538, Optical Constants of Materials for UV to X-Ray Wavelengths; (2004) https://doi.org/10.1117/12.563615
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Scandium containing multilayers have been produced with very high reflectivity in the soft x-ray spectrum. Accurate optical constants are required in order to model the multilayer reflectivity. Since there are relatively few measurements of the optical constants of Scandium in the soft x-ray region we have performed measurements over the energy range of 50-1,300 eV. Thin films of Scandium were deposited by ion-assisted magnetron sputtering at Linkoping University and DC Magnetron sputtering at CXRO. Transmission measurements were performed at the Advanced Light Source beamline 6.3.2. The absorption coefficient was deduced from the measurements and the dispersive part of the index of refraction was obtained using the Kramers-Kronig relation. The measured optical constants are used to model the near-normal incidence reflectivity of Cr/Sc multilayers near the Sc L_2,3 edge.

Citation Download Citation

Andrew L. Aquila, Farhad Salmassi, Eric M. Gullikson, Fredrik Eriksson, and Jens Birch "Measurements of the optical constants of scandium in the 50-1300eV range", Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); https://doi.org/10.1117/12.563615

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