Paper
14 October 2004 Zirconium and niobium transmission data at wavelengths from 11-16 nm and 200-1200 nm
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Abstract
Transmission measurements of niobium and zirconium at both extreme-ultraviolet (EUV) and ultraviolet, visible, and near infrared (UV/Vis/NIR) wavelengths are presented. Thin foils of various thicknesses mounted on nickel mesh substrates were measured, and these data were used to calculate the optical constants delta and beta of the complex refractive index n = 1- δ + iβ. β values were calculated directly from the measured transmittance of the foils after normalizing for the nickel mesh. The average beta values for each set of foils are presented as a function of wavelength. The real (dispersive) part of the refractive index, delta was then calculated from Kramers-Kronig analysis by combining these beta values with those from previous experimental data and the atomic tables.
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Terry A. Johnson, Regina Soufli, Eric M. Gullikson, and Miles Clift "Zirconium and niobium transmission data at wavelengths from 11-16 nm and 200-1200 nm", Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); https://doi.org/10.1117/12.564259
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Cited by 6 scholarly publications and 2 patents.
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KEYWORDS
Zirconium

Niobium

Transmittance

Extreme ultraviolet

Optical filters

Extreme ultraviolet lithography

Refractive index

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