4 November 2004 Mechanical bonding of two identical silicon planar refractive lenses
Author Affiliations +
Abstract
Si planar refractive lenses are well known and used for microfocusing and collimating synchrotron radiation. We have developed a method of X-ray lens bonding that allow to gain in a depth aperture of linear planar lenses by factor 2. Two identical Si refractive lenses were placed face-to-face with alignment precision of 3 μm and fixed by clamp. This lens system with total depth aperture of 200 μm has been tested on BM05 (ESRF, Grenoble, France) at 20 keV. Linear focusing with full width at half maximum of 8 μm and gain of 9 was measured at the distance of 270 cm from the lenses.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vyacheslav Yunkin, Vyacheslav Yunkin, Maxim V. Grigoriev, Maxim V. Grigoriev, Serguei Kuznetsov, Serguei Kuznetsov, Anatoly A. Snigirev, Anatoly A. Snigirev, Irina I. Snigireva, Irina I. Snigireva, } "Mechanical bonding of two identical silicon planar refractive lenses", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.564872; https://doi.org/10.1117/12.564872
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

Packaging methods and techniques for MOEMS and MEMS
Proceedings of SPIE (January 21 2005)
Micromachined silicon x-ray optics
Proceedings of SPIE (November 10 1994)
SOR Lithography in West Germany
Proceedings of SPIE (July 31 1989)
B-Si masks for storage ring X-ray lithography
Proceedings of SPIE (March 18 1984)

Back to Top