Paper
12 October 2004 Addressing large arrays of electrostatic actuators for adaptive optics applications
Author Affiliations +
Abstract
As the spatial resolution, stroke and speed requirements for advanced adaptive optics applications increase, the addressing of large numbers of electrostatic actuators for wavefront correction becomes more demanding. In this paper, we review the requirements, limits and the challenges of electrically addressing a large array of electrostatic actuators using an integrated CMOS technology. We also review the issues of high-rate data sourcing, signal channelization and multiplexing, and electronics integration (VLSI) with an eye on system power and size requirements. In examining the various CMOS technologies, we find that a broadly applicable 40V technology is currently available. Higher voltages are also available, albeit with additional design restrictions. Finally, we report preliminary work on a specific addressing scheme for a vertically-integrated VLSI/electrostatic MEMS prototype spatial phase modulator with 288x256 pixels at framing rates of 2kHz.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeremy R. Hui, Xingtao Wu, and Cardinal Warde "Addressing large arrays of electrostatic actuators for adaptive optics applications", Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); https://doi.org/10.1117/12.563892
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Cited by 8 scholarly publications.
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KEYWORDS
Actuators

Transistors

Microelectromechanical systems

Amplifiers

Optical amplifiers

Capacitors

Adaptive optics

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