Addressing large arrays of electrostatic actuators for adaptive optics applications

Jeremy R. Hui; Xingtao Wu; Cardinal Warde

doi:10.1117/12.563892

12 October 2004 Addressing large arrays of electrostatic actuators for adaptive optics applications

Jeremy R. Hui, Xingtao Wu, Cardinal Warde

Proceedings Volume 5553, Advanced Wavefront Control: Methods, Devices, and Applications II; (2004) https://doi.org/10.1117/12.563892
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

As the spatial resolution, stroke and speed requirements for advanced adaptive optics applications increase, the addressing of large numbers of electrostatic actuators for wavefront correction becomes more demanding. In this paper, we review the requirements, limits and the challenges of electrically addressing a large array of electrostatic actuators using an integrated CMOS technology. We also review the issues of high-rate data sourcing, signal channelization and multiplexing, and electronics integration (VLSI) with an eye on system power and size requirements. In examining the various CMOS technologies, we find that a broadly applicable 40V technology is currently available. Higher voltages are also available, albeit with additional design restrictions. Finally, we report preliminary work on a specific addressing scheme for a vertically-integrated VLSI/electrostatic MEMS prototype spatial phase modulator with 288x256 pixels at framing rates of 2kHz.

Citation Download Citation

Jeremy R. Hui, Xingtao Wu, and Cardinal Warde "Addressing large arrays of electrostatic actuators for adaptive optics applications", Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); https://doi.org/10.1117/12.563892

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available