12 October 2004 Addressing large arrays of electrostatic actuators for adaptive optics applications
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As the spatial resolution, stroke and speed requirements for advanced adaptive optics applications increase, the addressing of large numbers of electrostatic actuators for wavefront correction becomes more demanding. In this paper, we review the requirements, limits and the challenges of electrically addressing a large array of electrostatic actuators using an integrated CMOS technology. We also review the issues of high-rate data sourcing, signal channelization and multiplexing, and electronics integration (VLSI) with an eye on system power and size requirements. In examining the various CMOS technologies, we find that a broadly applicable 40V technology is currently available. Higher voltages are also available, albeit with additional design restrictions. Finally, we report preliminary work on a specific addressing scheme for a vertically-integrated VLSI/electrostatic MEMS prototype spatial phase modulator with 288x256 pixels at framing rates of 2kHz.
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Jeremy R. Hui, Jeremy R. Hui, Xingtao Wu, Xingtao Wu, Cardinal Warde, Cardinal Warde, } "Addressing large arrays of electrostatic actuators for adaptive optics applications", Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); doi: 10.1117/12.563892; https://doi.org/10.1117/12.563892

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