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12 October 2004 Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control
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Abstract
This paper describes design and fabrication of a microelectromechanical metal spatial light modulator (SLM) integrated with complementary metal-oxide semiconductor (CMOS) electronics, for high-dynamic-range wavefront control. The metal SLM consists of a large array of piston-motion MEMS mirror segments (pixels) which can deflect up to 0.78 µm each. Both 32x32 and 150x150 arrays of the actuators (1024 and 22500 elements respectively) were fabricated onto the CMOS driver electronics and individual pixels were addressed. A new process has been developed to reduce the topography during the metal MEMS processing to fabricate mirror pixels with improved optical quality.
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Hao Zhu, Paul Bierden, Steven Cornelissen, Thomas Bifano, and Jin-Hong Kim "Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control", Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); https://doi.org/10.1117/12.559929
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