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18 October 2004 The Nanostructured Origami 3D fabrication and assembly process
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Abstract
Nanostructured OrigamiTM 3D Fabrication and Assembly Process is a method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.
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George Barbastathis, Hyun Jin In, Will Arora, Tilman Buchner, Kehan Tian, and Henry I. Smith "The Nanostructured Origami 3D fabrication and assembly process", Proc. SPIE 5554, Photonics for Space Environments IX, (18 October 2004); https://doi.org/10.1117/12.562581
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