Advanced edge resist remover for photomask

Shinji Kobayashi; Norihisa Koga; Yasuo Mori; Masatoshi Kaneda

doi:10.1117/12.569181

6 December 2004 Advanced edge resist remover for photomask

Shinji Kobayashi, Norihisa Koga, Yasuo Mori, Masatoshi Kaneda

Proceedings Volume 5567, 24th Annual BACUS Symposium on Photomask Technology; (2004) https://doi.org/10.1117/12.569181
Event: Photomask Technology, 2004, Monterey, California, United States

Abstract

In photomask manufacturing, the corner and the edge of the photomask are stained by photo-resist after coating. Since such resist remains cause the particles when substrates are transferred inside the photomask manufacturing equipment, it is important to remove the stained areas. The scanning type photomask edge resist remover developed this time enables a rapid and accurate resist removal compared with similar type tool. Besides, the edge remover reduces the process time of edge resist removal to set slightly narrowing the removal width. The removal speed varies according to removal conditions; it decreases when the resist film density is high such as after the pre-bake. When determining removal conditions, defect and linearity of resist removal line should be well considered as well as the removal speed. It is important to define a balance among the thinner dispense rate, N2 flow and exhaust pressure to prevent defects and optimize the arm velocity to obtain good linearity of resist removal line. With this new edge resist remover, it is also possible to make a complex removal line that is difficult by conventional technology.

Citation Download Citation

Shinji Kobayashi, Norihisa Koga, Yasuo Mori, and Masatoshi Kaneda "Advanced edge resist remover for photomask", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.569181

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available