6 December 2004 Automatic bake plate calibration
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Abstract
In this paper, we introduce MaskTempTM, a novel wireless metrology system to record in-situ the temperature of a reticle during processing. In combination with OnWafer Technologies' AutoCal bake plate optimization software, MaskTemp provides a quick and easy method to fingerprint and optimize the within-plate temperature uniformity of advanced PEB plates.Thermal data is collected across multiple bake plates, and we show substantial within-plate and plate-to-plate improvements in advanced multi-zone hot plates calibrated with conventional methods.
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Paul MacDonald, Paul MacDonald, } "Automatic bake plate calibration", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); doi: 10.1117/12.597638; https://doi.org/10.1117/12.597638
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