Maintaining lithographic quality during OPC for low-k1 and MEEF processes constrained by mask dimensional rules

Christopher M. Cork; Lawrence S. Melvin III; Michael Miller; Robert M. Lugg; Michael L. Rieger

doi:10.1117/12.568550

6 December 2004 Maintaining lithographic quality during OPC for low k1 and MEEF processes constrained by mask dimensional rules

Christopher M. Cork, Lawrence S. Melvin III, Michael Miller, Robert M. Lugg, Michael L. Rieger

Author Affiliations +

Proceedings Volume 5567, 24th Annual BACUS Symposium on Photomask Technology; (2004) https://doi.org/10.1117/12.568550
Event: Photomask Technology, 2004, Monterey, California, United States

Abstract

Mask fabrication rules can interfere with the ability of OPC and RET shape generation to achieve the best lithographic quality on silicon. With low k1 lithography, ideal correction shapes dictated by lithography-based simulation frequently violate mask geometry constraints. Because the scaled spatial bandwidth of the wafer lithography process is lower than that of the mask process there are some degrees of freedom in OPC shape generation to optimize for lithographic accuracy and mask compliance together. In this paper we discuss strategies to embed mask rule compliance in correct-by-construction model-based OPC.

Citation Download Citation

Christopher M. Cork, Lawrence S. Melvin III, Michael Miller, Robert M. Lugg, and Michael L. Rieger "Maintaining lithographic quality during OPC for low k1 and MEEF processes constrained by mask dimensional rules", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.568550

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available