8 September 2004 Designing the micro opto mechanical vibration sensor
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Proceedings Volume 5576, Lightguides and their Applications II; (2004) https://doi.org/10.1117/12.581736
Event: Lightguides and their Applications II, 2003, Krasnobrod, Poland
Abstract
The work is related to the design of vibration sensor's head represented by MOEMS structure. The head consists of two optical fibers and micro beam that lays between them. The principle of operation of the head is free space light modulation by micro beam. The elaborated head model enables analysis of influence of head and stimulation parameters on measured output light. The main parameters of the head are material used for micro beam fabrication and beam dimensions. The micro beam can be fabricated monolithically or as added component so it can be made from silicon or glass. The micro beam types qualify the sensor type as amplitude or frequency transformer. These head types require different types of detection block. What is interesting, technologically simpler frequency transformer requires more complex detection device than amplitude transformer.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michal Borecki, Jerzy Kruszewski, "Designing the micro opto mechanical vibration sensor", Proc. SPIE 5576, Lightguides and their Applications II, (8 September 2004); doi: 10.1117/12.581736; https://doi.org/10.1117/12.581736
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