20 December 2004 Optical MEMS-based bimorph for thermal sensing
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Micro-electro-mechanical-systems (MEMS) offer many advantages for sensing a variety of physical parameters such as accceleration, pressure and temperature. Their small size allows them to operate in close proximity where conventional sensors cannot be introduced especially for thermal measurements. Temperature measurement and control is of fundamental importance to the optimal operating conditions of materials and machinery such as gas turbine engines, space exploration, etc. The temperature characterization will allow proper diagnosis of operating conditions and hence the optimization of controls and environment in order to augment performance and useful lifetime. MEMS based thermal measurements will be very useful as they are sensitive to small fluctuations in the operating conditions. Here, this paper proposes a novel MEMS based bimorph optical device as a thermal sensor. The paper includes the theoretical and experimental analysis on the thermal behavior of optical MEMS devices under different geometrical and parametric conditions. The paper also presents the static and dynamic behavior of optical MEMS based devices under different thermal environments. The results obtained verify the validity of the proposed designs for thermal sensing.
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Gino Rinaldi, Muthukumaran Packirisamy, Ion G. Stiharu, "Optical MEMS-based bimorph for thermal sensing", Proc. SPIE 5577, Photonics North 2004: Optical Components and Devices, (20 December 2004); doi: 10.1117/12.567508; https://doi.org/10.1117/12.567508

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