20 December 2004 Optical detection of angular acceleration rate for MEMS-based gyroscopes
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Abstract
This paper explores a novel way of sensing the angular velocity rate change of MEMS based gyroscopes with optical methods. In the capacitive sensing mechanism, displacement due to angular rate induces differential capacitance, requiring many supporting filtering and amplification sub-systems and circuits in the device to eliminate the noise. One of the most important aspects of using optical sensing elements with MEMS technology is the elimination of capacitive sensing used in conventional MEMS based gyroscopes. Conventional bulky optical gyroscopes based on Sagnac effect, with very small drift-rate parameters, is difficult to be implemented with MEMS technology due to the requirement of large area enclosed by the laser ring and fiber optic paths. Light interference effect of optical properties can permit the phase shift measurement of the light wavelength. In this paper, the combination of optical and mechanical systems is studied for estimating angular acceleration rate by Coriolis Effect.
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Vahe Nerguizian, Vahe Nerguizian, Ali Qobadian-Kalhor, Ali Qobadian-Kalhor, Muthukumaran Packirisamy, Muthukumaran Packirisamy, Ion G. Stiharu, Ion G. Stiharu, } "Optical detection of angular acceleration rate for MEMS-based gyroscopes", Proc. SPIE 5577, Photonics North 2004: Optical Components and Devices, (20 December 2004); doi: 10.1117/12.567425; https://doi.org/10.1117/12.567425
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