Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structures

Mark A. Bader; Christoph Kappel; Andre Selle; Jurgen Ihlemann; Mi Li Ng; Peter Robert Herman

doi:10.1117/12.567350

9 December 2004 Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structures

Mark A. Bader, Christoph Kappel, Andre Selle, Jurgen Ihlemann, Mi Li Ng, Peter Robert Herman

Author Affiliations +

Proceedings Volume 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education; (2004) https://doi.org/10.1117/12.567350
Event: Photonics North, 2004, Ottawa, Ontario, Canada

Abstract

Submicron surface-relief gratings were fabricated in ultrathin dielectric films by F2-laser ablation. Projection mask imaging by a Schwarzschild objective applying nanosecond duration pulses from a high-resolution 157-nm optical processing system generated 780-nm-period gratings in various thin oxide layers. The grating modulation depths were controlled within tens of nanometers by applying suitable energy densities and number of pulses. Thus, high-resolution laser ablation proves to be a promising alternative approach to well-known lithographic methods for the fabrication of submicron-period gratings in thin films. Such gratings are the most critical component of grating waveguide structures (GWS) that comprise of a substrate, a thin waveguide, and a grating layer in a planar multilayer structure. Interference effects in a GWS will provide high reflection efficiency under resonance conditions for an ideal grating with no absorption losses. The resonance spectral responses of the F2-laser ablated gratings have been investigated using an ultrashort-pulse titanium-sapphire laser. Their potential for optical applications will be shown and discussed. GWS are attractive for optical switches or modulators, narrow-band spectral filters, high reflectivity mirrors, bio-sensor chips and many other applications.

Citation Download Citation

Mark A. Bader, Christoph Kappel, Andre Selle, Jurgen Ihlemann, Mi Li Ng, and Peter Robert Herman "Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structures", Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); https://doi.org/10.1117/12.567350

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available