9 December 2004 Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air
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Abstract
SiOx microforest-like structures have been produced on Si (100) surfaces by pulsed excimer laser irradiation in air. Scanning electron microscopic observations have indicated these structures, which are composed of aggregated nanoparticles, to be 1-5 μm in diameter and 10-20 μm high, and to have the appearance of trees. XPS analysis has shown them to be composed of a-SiOx (1
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De-Quan Yang, De-Quan Yang, Edward Sacher, Edward Sacher, Michel Meunier, Michel Meunier, } "Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air", Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); doi: 10.1117/12.567860; https://doi.org/10.1117/12.567860
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