Pulsed electron beam ablation of ferroelectric materials: spectroscopic investigation

M. Nistor; F. Gherendi; M. Magureanu; N. B. Mandache; Andrei Ioachim; G. Banciu; D. Dumitriu

doi:10.1117/12.582814

21 October 2004 Pulsed electron beam ablation of ferroelectric materials: spectroscopic investigation

M. Nistor, F. Gherendi, M. Magureanu, N. B. Mandache, Andrei Ioachim, G. Banciu, D. Dumitriu

Proceedings Volume 5581, ROMOPTO 2003: Seventh Conference on Optics; (2004) https://doi.org/10.1117/12.582814
Event: ROMOPTO 2003: Seventh Conference on Optics, 2003, Constanta, Romania

Abstract

A compact pulsed electron beam source based on a channel-spark discharge was studied with the aim to find the optimum operating conditions for an efficient ablation of ferroelectric materials for thin-film deposition. The ablation plasma was studied by time-resolved optical emission spectroscopy. The temporal evolution of the spectral lines of target material and working gas was monitored. In the present discharge configuration a long lasting plasma is characteristic, as proved by the temporal evolution of excited atoms and ions.

Citation Download Citation

M. Nistor, F. Gherendi, M. Magureanu, N. B. Mandache, Andrei Ioachim, G. Banciu, and D. Dumitriu "Pulsed electron beam ablation of ferroelectric materials: spectroscopic investigation", Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); https://doi.org/10.1117/12.582814

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