21 October 2004 Pulsed electron beam ablation of ferroelectric materials: spectroscopic investigation
Author Affiliations +
Proceedings Volume 5581, ROMOPTO 2003: Seventh Conference on Optics; (2004) https://doi.org/10.1117/12.582814
Event: ROMOPTO 2003: Seventh Conference on Optics, 2003, Constanta, Romania
Abstract
A compact pulsed electron beam source based on a channel-spark discharge was studied with the aim to find the optimum operating conditions for an efficient ablation of ferroelectric materials for thin-film deposition. The ablation plasma was studied by time-resolved optical emission spectroscopy. The temporal evolution of the spectral lines of target material and working gas was monitored. In the present discharge configuration a long lasting plasma is characteristic, as proved by the temporal evolution of excited atoms and ions.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Nistor, M. Nistor, F. Gherendi, F. Gherendi, M. Magureanu, M. Magureanu, N. B. Mandache, N. B. Mandache, Andrei Ioachim, Andrei Ioachim, G. Banciu, G. Banciu, D. Dumitriu, D. Dumitriu, } "Pulsed electron beam ablation of ferroelectric materials: spectroscopic investigation", Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); doi: 10.1117/12.582814; https://doi.org/10.1117/12.582814
PROCEEDINGS
6 PAGES


SHARE
Back to Top