19 January 2005 Design, fabrication, and characterization of whispering-gallery mode miniature sensors
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Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.571303
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
In this paper, we present the design, fabrication and characterization of the whispering-gallery mode (WGM) miniature sensors for potential use in biosensing at the nanometer scale. In order to understand and investigate the characteristics of WGM resonances, we designed and fabricated a number of sensors with different dimensions. Each sensor is a micro/nano-structure consisted of a microdisk as the resonating cavity and a micro waveguide for light delivery and collection. In addition to the waveguides having uniform cross-section dimensions, tapered waveguide was also considered in our studies. A simulation model was employed to characterize the EM field and radiation energy density of the designed sensors. The gap effects on WGM resonance in terms of quality factor and full width at half maximum (FWHM) were evaluated. Following the design and characterization, the sensors were fabricated in 1.3μm-thick Si3N4 film using 248nm optical lithography and conventional silicon IC processing. Top and down SEM measurements of the fabricated sensors were conducted and the data for the sensors in one device are given.
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Haiyong Quan, Haiyong Quan, Zhixiong Guo, Zhixiong Guo, Lei Xu, Lei Xu, Stanley Pau, Stanley Pau, } "Design, fabrication, and characterization of whispering-gallery mode miniature sensors", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.571303; https://doi.org/10.1117/12.571303
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