19 January 2005 Fabrication-limited design of a reconfigurable PBG MEMS waveguide device
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Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.571430
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
We report on our design and fabrication of a semiconductor based photonic bandgap nano-membrane device with MEMS features. This device could be used as a basic building block for a reconfigurable optoelectronic integrated circuit that can be reprogrammed for many different functionalities.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David M. Mackie, David M. Mackie, Weimin Zhou, Weimin Zhou, Monica Taysing-Lara, Monica Taysing-Lara, Gerard Dang, Gerard Dang, } "Fabrication-limited design of a reconfigurable PBG MEMS waveguide device", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.571430; https://doi.org/10.1117/12.571430
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