19 January 2005 Lithographic nanofabrication of optical cavities
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Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.571540
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
Lithographic control over nanostructures has recently evolved to an accuracy that permits the sub-wavelength manipulation of light within high refractive index semiconductors. We have used this lithographic control to fabricate two-dimensional photonic crystal cavities and micro-ring resonators. Here we will show the fabrication techniques utilized for the construction of High-Q nanocavities and, in particular, focus on the influence of present-day lithographic and etching procedures on the performance of the cavities. Applications of these optical cavities range from communications to chemical sensing and we will describe the effects of geometry on the different applications. We show the use of optical cavities for the miniaturization of optical spectroscopy systems with ultra-high spatial and spectral resolution.
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Guy A. DeRose, Guy A. DeRose, Marko Loncar, Marko Loncar, Mark L. Adams, Mark L. Adams, Michael Hochberg, Michael Hochberg, Axel Scherer, Axel Scherer, } "Lithographic nanofabrication of optical cavities", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.571540; https://doi.org/10.1117/12.571540
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