29 December 2004 Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors
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Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004) https://doi.org/10.1117/12.573900
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
Thin film multi-layered chalcogenide glass waveguide structures have been fabricated for evanescent wave sensing of bio toxins and other applications. Thin films of Ge containing chalcogenides have been deposited onto Si substrates, with a-GeSe2 as the cladding layer and a-GeSbSe as the core layer to form the slab waveguide. Channel waveguides have been written in the slab waveguides by appropriate light the through a mask. The photo-induced structural changes in the core layer selectively enhance refractive index at the portions of interest and thus confining the light to the channels. The waveguides have been characterized and tested for the guiding of light.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ashtosh Ganjoo, Ashtosh Ganjoo, Himanshu Jain, Himanshu Jain, Joseph V. Ryan, Joseph V. Ryan, Renbo Song, Renbo Song, Rima Chanda, Rima Chanda, Joseph Irudayaraj, Joseph Irudayaraj, Yujie Ding, Yujie Ding, Carlo G. Pantano, Carlo G. Pantano, } "Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); doi: 10.1117/12.573900; https://doi.org/10.1117/12.573900
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