Integrated poly-SiGe nanomechanical resonators for wireless sensor nodes

Emmanuel P. Quevy; Tsu-Jae King; Roger T. Howe

doi:10.1117/12.573034

29 December 2004 Integrated poly-SiGe nanomechanical resonators for wireless sensor nodes

Emmanuel P. Quevy, Tsu-Jae King, Roger T. Howe

Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004) https://doi.org/10.1117/12.573034
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

Wireless Sensor Nodes are basic building blocks for future ubiquitous networks. These nodes have to be able to gather and transmit information to their neighbors in complete autonomy. This means that with no battery, they rely on scavenging the energy necessary to operate directly from their environment, like conversion of solar or vibration based energy. This stringent requirement drastically limits the power budget of those devices to a level below 100μW. From the architecture prospective, work on reducing the complexity of the transceiver is mandatory, in order to reduce both size and power consumption. The simplest approach relies on the on/off modulation of a GHz range carrier frequency signal in a transmit channel, which is then directly selected and demodulated in the receiving path. For these particular functionalities, i.e. frequency generation and filtering, nano-mechanical resonators present a strong advantage of scalability that helps to integrate them into dense arrays directly on top of CMOS. This avoids package parasitic, allows for MEMS/circuitry co-design, and eventually leads to size shrinkage and power saving.

Citation Download Citation

Emmanuel P. Quevy, Tsu-Jae King, and Roger T. Howe "Integrated poly-SiGe nanomechanical resonators for wireless sensor nodes", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); https://doi.org/10.1117/12.573034

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