Integration of metal-oxide nanobelts with microsystems for sensor applications

Choongho Yu; Qing Hao; Li Shi; Xiangyang Kong; Zhong Lin Wang

doi:10.1117/12.570971

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29 December 2004 Integration of metal-oxide nanobelts with microsystems for sensor applications

Choongho Yu, Qing Hao, Li Shi, Xiangyang Kong, Zhong Lin Wang

Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004) https://doi.org/10.1117/12.570971
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

Single-crystalline tin dioxide (SnO₂) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO₂), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

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Choongho Yu, Qing Hao, Li Shi, Xiangyang Kong, and Zhong Lin Wang "Integration of metal-oxide nanobelts with microsystems for sensor applications", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); https://doi.org/10.1117/12.570971

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