29 December 2004 Integration of metal-oxide nanobelts with microsystems for sensor applications
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Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004) https://doi.org/10.1117/12.570971
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
Single-crystalline tin dioxide (SnO2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.
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Choongho Yu, Choongho Yu, Qing Hao, Qing Hao, Li Shi, Li Shi, Xiangyang Kong, Xiangyang Kong, Zhong Lin Wang, Zhong Lin Wang, } "Integration of metal-oxide nanobelts with microsystems for sensor applications", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); doi: 10.1117/12.570971; https://doi.org/10.1117/12.570971
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