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29 December 2004 Platinum and gold nanostructures on silicon via a self-assembled template
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Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004)
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Parallel arrays of self-assembled rare earth disilicides (erbium and dysprosium) nanowires were grown on Si(001) substrates with nanowire width between 3-10 nm and used as a template for fabricating noble metal (platinum and gold) nanostructure arrays. Submonolayer coverage of platinum and gold were deposited on the nanowire/Si(001) surface post rare earth disilicide growth. Scanning tunneling microscopy and reactive ion etching showed that platinum and gold preferentially deposited on the nanowire surface versus the Si surface. Reactive ion etching of erbium disilicide nanowires with and without platinum on the surface demonstrated that platinum acted as a more resistant etch mask than erbium disilicide. By varying the platinum coverage on the surface we demonstrate the ability to select arrays of nanowire or nanocrystal arrays as a function of platinum coverage.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Regina Ragan, Sehun Kim, Yong Chen, Xuema Li, and R. Stanley Williams "Platinum and gold nanostructures on silicon via a self-assembled template", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004);

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