Design and performance of a self-sensing, self-actuating piezoelectric monomorph with interdigitated electrodes

Yong K. Hong; Heung-Keun Park; Sung Q Lee; Kee S. Moon; Raghav R. Vanga; Miguel Levy

doi:10.1117/12.571569

25 October 2004 Design and performance of a self-sensing, self-actuating piezoelectric monomorph with interdigitated electrodes

Yong K. Hong, Heung-Keun Park, Sung Q Lee, Kee S. Moon, Raghav R. Vanga, Miguel Levy

Author Affiliations +

Proceedings Volume 5602, Optomechatronic Sensors, Actuators, and Control; (2004) https://doi.org/10.1117/12.571569
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

A smart cantilever structure using single-crystal relaxor ferroelectric material is presented. The smart cantilever possesses both sensing and actuation capabilities, embedded in a monomorph and resulting in a smart structure. Single crystal relaxor ferroelectric materials (1-x)Pb(Zn_1/3Nb_2/3)O_3-xPbTiO₃ (PZN-PT) and (1-x)Pb(Mg_1/3Nb_2/3)O_3-xPbTiO₃ (PMN-PT) are ideal for actuator and sensor applications since they exhibit very high piezoelectric coefficients. We separately pattern interdigitated electrodes on the top and bottom surfaces of a single crystal cantilever beam. The interdigitated electrode design results in an electric field- gradient that after poling not only induces flapping actuation but also, simultaneously, allows us to detect internally or externally induced stresses. As a monolithic actuator integrated with a sensor, it has potential applications in various Micro-Electro-Mechanical Systems (MEMS), Scanning Probe Microscopy (SPM) and Near-field Scanning Optical Microscopy (NSOM). We fabricate monomorph prototypes and characterize their performance in terms of actuation displacement and sensing capabilities, respectively. Finally, an active vibration control experiment was successfully conducted by using the smart cantilever structure.

Citation Download Citation

Yong K. Hong, Heung-Keun Park, Sung Q Lee, Kee S. Moon, Raghav R. Vanga, and Miguel Levy "Design and performance of a self-sensing, self-actuating piezoelectric monomorph with interdigitated electrodes", Proc. SPIE 5602, Optomechatronic Sensors, Actuators, and Control, (25 October 2004); https://doi.org/10.1117/12.571569

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available