25 October 2004 Mechanical effects induced by adsorption and hybridization on micromechanical structures
Author Affiliations +
Proceedings Volume 5602, Optomechatronic Sensors, Actuators, and Control; (2004) https://doi.org/10.1117/12.571192
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
An experimental set-up to measure the out-of-plane displacement field of surfaces in reflection microscopy is presented. It is derived from a Nomarski shear-interferometer. When the shear is greater than the length of the microcantilever, this interferometer, used with a sinusoidal phase modulation and four integrating buckets, allows one to obtain the displacement field of the observed surface, with a reproductibility in the 10 pm range. Identification techniques derived from the "Equilibrium Gap Method" developed recently to measure local mechanical properties and loading, the displacement field measured by the shear-interferometer may be used to determine simultaneously the "temperature" field and the local elastic properties of the cantilever. The feasibility of the in-situ (in water solution) full-field measurement of displacement fields in MEMS is proved, and preliminary results tends to show that mechanical effets induced by DNA hybridization are heterogeneous.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fabien Amiot, Jean Paul Roger, Albert Claude Boccara, "Mechanical effects induced by adsorption and hybridization on micromechanical structures", Proc. SPIE 5602, Optomechatronic Sensors, Actuators, and Control, (25 October 2004); doi: 10.1117/12.571192; https://doi.org/10.1117/12.571192
PROCEEDINGS
7 PAGES


SHARE
Back to Top