25 October 2004 Mechanical effects induced by adsorption and hybridization on micromechanical structures
Author Affiliations +
Proceedings Volume 5602, Optomechatronic Sensors, Actuators, and Control; (2004) https://doi.org/10.1117/12.571192
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
An experimental set-up to measure the out-of-plane displacement field of surfaces in reflection microscopy is presented. It is derived from a Nomarski shear-interferometer. When the shear is greater than the length of the microcantilever, this interferometer, used with a sinusoidal phase modulation and four integrating buckets, allows one to obtain the displacement field of the observed surface, with a reproductibility in the 10 pm range. Identification techniques derived from the "Equilibrium Gap Method" developed recently to measure local mechanical properties and loading, the displacement field measured by the shear-interferometer may be used to determine simultaneously the "temperature" field and the local elastic properties of the cantilever. The feasibility of the in-situ (in water solution) full-field measurement of displacement fields in MEMS is proved, and preliminary results tends to show that mechanical effets induced by DNA hybridization are heterogeneous.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fabien Amiot, Fabien Amiot, Jean Paul Roger, Jean Paul Roger, Albert Claude Boccara, Albert Claude Boccara, } "Mechanical effects induced by adsorption and hybridization on micromechanical structures", Proc. SPIE 5602, Optomechatronic Sensors, Actuators, and Control, (25 October 2004); doi: 10.1117/12.571192; https://doi.org/10.1117/12.571192

Back to Top