A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric sensors

Deok-Ho Kim; Moon-Gu Lee; Byungkyu Kim; Jae-Hong Shim

doi:10.1117/12.577837

25 October 2004 A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric sensors

Deok-Ho Kim, Moon-Gu Lee, Byungkyu Kim, Jae-Hong Shim

Proceedings Volume 5604, Optomechatronic Micro/Nano Components, Devices, and Systems; (2004) https://doi.org/10.1117/12.577837
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

This paper presents a superelastic alloy microgripper with integrated electromagnetic actuators and piezoelectric sensors. The design parameters for electromagnetic actuators in the microgripper are selected based on the sensitivity analysis using FEM analysis. For integration of miniature force sensors in the microgripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are also presented. Electro discharge machining technology is employed to fabricate the microgripper structure made of superelastic NiTi alloy. The experimental setup is implemented to evaluate the performance of the fabricated force sensors and electromagnetic actuators integrated into the microgripper. Finally, results of finite element computer simulations for electromagnetic actuators and piezoelectric polymer sensors are compared with experimental results.

Citation Download Citation

Deok-Ho Kim, Moon-Gu Lee, Byungkyu Kim, and Jae-Hong Shim "A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric sensors", Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004); https://doi.org/10.1117/12.577837

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