Advances in a digital network society require both higher densities and higher transfer rates in all sorts of storage devices. In optical recording, the trend toward higher recording density and larger storage capacity requires novel surface recording technologies that would drastically improve recording density. To satisfy these severe requirements, we have already proposed a compact integrated optical head slider assembly for proximity optical recording based on the "near field principle". Using the optical head slider, we have successfully demonstrated readout signals from 200 to 150-nm-long bit patterns at frequency bands up to approximately 10 MHz. However, from the practical point of view, it is quite necessary to evaluate readout signals from patterns of smaller (sub-micron to sub-sub-micron) track width in order to prove high-density recording potential. In this paper, we have investigated tracking accuracy characteristics utilizing sub-micron sized alternate patterns of 1-mm length formed in a straight line in the circumferential direction of the medium. Arranging precisely the head's relative position to these recorded patterns, we have successfully obtained readout signals just crossing the sub-micron line-and-space pattern's boundaries. Assuming that an aperture runs along an accurate trajectory of the arc of a circle, readout signal amplitude variations when crossing the pattern edge at a right angle have precisely predicted. Also, the influences of track width on maximum readout signal intensity and tracking sensitivity are discussed in detail.