8 December 2004 Micromachined modulator arrays for use in free-space optical communication systems
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Abstract
A summary is presented of some of the design criteria relevant to the realisation of silicon micromachined modulator arrays for use in free-space optical communication systems. Theoretical performance levels achievable are compared with values measured on experimental devices produced using a modified Multi-User MEMS Process (MUMPS). Devices capable of realising modulation rates in excess of 300 kHz are described and their optical characteristics compared with published data on devices based on multiple quantum well technology.
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Keith L. Lewis, Kevin D. Ridley, Mark E. McNie, Gilbert W. Smith, Andrew M. Scott, "Micromachined modulator arrays for use in free-space optical communication systems", Proc. SPIE 5614, Advanced Free-Space Optical Communications Techniques and Technologies, (8 December 2004); doi: 10.1117/12.578552; https://doi.org/10.1117/12.578552
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KEYWORDS
Modulators

Silicon

Modulation

Microopto electromechanical systems

Mirrors

Free space optical communications

Telecommunications

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