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21 October 2004 Integrated electro-optic Mach-Zehnder switch realized by Zinc in-diffusion
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Proceedings Volume 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications; (2004) https://doi.org/10.1117/12.590829
Event: 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, 2004, Porlamar, Venezuela
Abstract
We demonstrate the use of an area selective zinc in-diffusion technique to fabricate an integrated InP/InGaAsP Mach-Zehnder optical switch. The zinc in-diffusion process using a semi-sealed open-tube diffusion furnace was characterized to enable the creation of p-n junctions at a precise depth in selected areas of the device sample. The method is simple, yet highly controllable and reproducible; with the crystal quality remaining intact after the diffusion process is complete. Using this technique an integrated 1 x 2 Mach-Zehnder optical switch has been fabricated. Our preliminary devices show a switch contrast ratio of 12 dB with a voltage swing of ±2.5 volts. Improving our fabrication process will further optimize the performance of the switch. Nevertheless, very good electrical isolation is obtained between the contacts, which demostrates the potential of the technique for the fabrication of Photonic Integrated Circuits.
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Daniel A. May-Arrioja and Patrick LiKamWa "Integrated electro-optic Mach-Zehnder switch realized by Zinc in-diffusion", Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); https://doi.org/10.1117/12.590829
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