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10 January 2005 Innovative nano-optical devices and optical integration using nano-fabrication technologies
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Proceedings Volume 5623, Passive Components and Fiber-based Devices; (2005) https://doi.org/10.1117/12.580102
Event: Asia-Pacific Optical Communications, 2004, Beijing, China
Abstract
We developed various optical devices and integrated optical devices based on innovative nano-optical structures and design. The nano-optical devices and integrated devices were fabricated through a nano-manufacturing platform based on wafer level nano-replication with mold and nano-pattern transfer by nano-lithography. The nano-replication process, which based on imprinting a single-layer spin-coated UV curable resist, achieved excellent nano-patterning fidelity and on-wafer uniformity with high-throughput. Excellent wafer level performance and yield were achieved. Nano-optic devices, such as, quarter wave plates and polarizers, and integrated nano-optical devices, such as monolithically integrated semi-isolators, were manufactured with the nano-manufacturing platform. The developed technology is suitable for high-throughput and low cost manufacturing needs for commercializing nano-structure based optical devices and integrated optical devices.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jian Jim Wang, Xuegong Deng, Lei Chen, Paul F. Sciortino, Jiandong Deng, Feng Liu, Anguel Nikolov, Alan Graham, and Yonglin Huang "Innovative nano-optical devices and optical integration using nano-fabrication technologies", Proc. SPIE 5623, Passive Components and Fiber-based Devices, (10 January 2005); https://doi.org/10.1117/12.580102
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