High-performance InP-based resonant-cavity-enhanced photodetector based on InP/air-gap Bragg reflectors

Yongqing Huang; Xiaomin Ren; Hui Huang; Qi Wang; Xingyan Wang

doi:10.1117/12.580157

31 January 2005 High-performance InP-based resonant-cavity-enhanced photodetector based on InP/air-gap Bragg reflectors

Yongqing Huang, Xiaomin Ren, Hui Huang, Qi Wang, Xingyan Wang

Proceedings Volume 5624, Semiconductor and Organic Optoelectronic Materials and Devices; (2005) https://doi.org/10.1117/12.580157
Event: Asia-Pacific Optical Communications, 2004, Beijing, China

Abstract

In this paper, we demonstrate the design, fabrication and characterization of a long wavelength InP-based resonant cavity photodetector with InP/air-gap Bragg reflectors by using selective wet etching. The bottom mirror of the RCE photodetector is the InP/air-gap Bragg reflector; the top mirror is formed by the interface of semiconductor/air. The In0.53Ga0.47As absorption layer thickness is 300nm. A peak quantum efficiency of 60% at 1510nm and a 3-dB bandwidth of 16GHz are achieved with the active area of 50×50μm². The dark current as low as 2nA was achieved at reverse bias of 3.0V.

Citation Download Citation

Yongqing Huang, Xiaomin Ren, Hui Huang, Qi Wang, and Xingyan Wang "High-performance InP-based resonant-cavity-enhanced photodetector based on InP/air-gap Bragg reflectors", Proc. SPIE 5624, Semiconductor and Organic Optoelectronic Materials and Devices, (31 January 2005); https://doi.org/10.1117/12.580157

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