31 January 2005 Silicon photonics: applications, recent results, and integration challenges as they relate to CMOS processing--an industry perspective
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Abstract
Silicon photonics, especially that based on silicon-on-insulator (SOI), has recently attracted a great deal of attention. The mature industrial infrastructure of CMOS fabrication offers an opportunity for low cost silicon based opto-electronic solutions for applications ranging from telecommunications to chip-to-chip interconnects. The high volume and high performance manufacturing disciplines are advantageous to electro-optics application development and fabrication. However, many technical hurdles still need to be addressed. This paper will give an overview of these opportunities as well as discuss some practical issues and challenges concerning processing silicon photonic devices in a high volume CMOS manufacturing environment.
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Oded Cohen, Oded Cohen, Mike Salib, Mike Salib, Mike Morse, Mike Morse, Mario J. Paniccia, Mario J. Paniccia, } "Silicon photonics: applications, recent results, and integration challenges as they relate to CMOS processing--an industry perspective", Proc. SPIE 5624, Semiconductor and Organic Optoelectronic Materials and Devices, (31 January 2005); doi: 10.1117/12.583066; https://doi.org/10.1117/12.583066
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