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11 February 2005 Study on MEMS optical measurement system
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Proceedings Volume 5625, Optical Transmission, Switching, and Subsystems II; (2005)
Event: Asia-Pacific Optical Communications, 2004, Beijing, China
A optical measurement system of Micro-electro-mechanical system (MEMS) motion is demonstrated to increase the efficiency of MEMS design and manufacturing. The system is developed based on the heterodyne laser Doppler technology, and frequency shift of 40MHz is introduced by a Bragg cell. The paper introduced MEMS vibration theory, designed optical structure and electronic circuit, and obtained the linear relation between the Doppler shift and the target velocity. Experiments on driving and measuring double-ended tuning fork resonator were carried out. The resonator is driven by using electrostatic force at its natural frequency 2.4KHz. Experimental results indicate that the measure system can be used to measure MEMS motion with high accuracy.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Changlin Leng, Guoxiong Zhang, Fusheng Yu, Chenzhi Jiang, and Ying Zhong "Study on MEMS optical measurement system", Proc. SPIE 5625, Optical Transmission, Switching, and Subsystems II, (11 February 2005);

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