Microfabrication of optical elements with femtosecond Ti:sapphire laser oscillator

Bing Bai; Changhe Zhou; Xiaohui Sun; Huayi Ru

doi:10.1117/12.576130

Abstract

We report the experimental fabrication of optical elements with femtosecond pulses. The laser source we adopted is a low power Ti: sapphire laser oscillator, with a central wavelength of 790 nm and pulse duration of 100 fs. Positive-photoresist-coated film acts as the sacrificial material. To obtain the optical elements, three microobjectives with high numerical aperture 0.25 and 0.1 were used to focus the light beam of femtosecond laser. Due to the extreme high intensity of the tightly focused femtosecond laser beam, nonlinear effect occurred between photoresist and the laser pulses, which enable the ablation of the photoresist. In the experiments, we use a translational stage that hold the sample by a pump through a ventage. Various gratings and phase plates are fabricated by this method. The obtained gratings patterns are checked with a conventional optical microscopy. The fabricating widths and depths are measured with the Taylor Hobson equipment. With the same method, photomask for microelectronics can also be fabricated. From the experimental results, we see that the fabrication of the different microobjectives can be achieved with this method. This technique can be applied to the fields of microoptics and microelectronics. The mechanism between femtosecond laser and photoresist is also investigated. The processing mechanics is considered as laser ablation. Fabrication of optical elements with femtosecond laser reflects a new trend for fabrication of microoptical elements.

Citation Download Citation

Bing Bai, Bing Bai, Changhe Zhou, Changhe Zhou, Xiaohui Sun, Xiaohui Sun, Huayi Ru, Huayi Ru, } "Microfabrication of optical elements with femtosecond Ti:sapphire laser oscillator", Proc. SPIE 5629, Lasers in Material Processing and Manufacturing II, (13 January 2005); doi: 10.1117/12.576130; https://doi.org/10.1117/12.576130

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years