13 January 2005 Transparent materials microprocessing by nanosecond ultraviolet laser
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Abstract
Development of precision micro-fabrication techniques for transparent materials such as crystal quartz, sapphire, silica glass is strongly desired in various industrial. During laser ablation the quality of micro-fabrication depends strongly on the optical breakdown region induced by laser irradiation. In this work, nanosecond ultraviolet laser can be used to micro-process on the surface of silica glass and microcrystal glass in air. The experiments demonstrate that number of laser pulse, scanning velocity, laser wavelength and absorption index of these materials are important factors affecting quality of micro-fabrication using ultraviolet laser.
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Guangzhi Zhu, Changhong Zhu, Xiao Yuan, Xiao Zhu, Peixiang Lu, "Transparent materials microprocessing by nanosecond ultraviolet laser", Proc. SPIE 5629, Lasers in Material Processing and Manufacturing II, (13 January 2005); doi: 10.1117/12.569523; https://doi.org/10.1117/12.569523
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