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6 May 1985 Aspherization And Multilayer Coating Of A RITCHEY-CHRETIEN Telescope For λ = 30.4 nm
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Abstract
A high vacuum system designed for the deposition of multilayers for soft X-ray mirrors is described. It is applied to the aspherization and multilayer coating of the mirrors of a solar Ritchey-Chretien telescope. In a first step, laterally graded boron layers are deposited on flat polished silica substrate in order to determine their thickness profile by visible light interferometry. The next step consists in the characterization ofmultilayers deposited on top of the boron layer. Grazing incidence X-ray interferometry is applied to the measurement of interface roughness ; the results are used to predict the performances of W/Si multilayers ; it is found that reflectivity values of about 25 % could be obtained for normal reflection at 30.4 nm.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. P. Chauvineau, D. Decanini, M . Mullot, L. Valiergue, and J. P . Delaboudiniere "Aspherization And Multilayer Coating Of A RITCHEY-CHRETIEN Telescope For λ = 30.4 nm", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949677
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