Automatic deposition of multilayer X-ray coatings with laterally graded d-spacing

M. P. Bruijn; P. Chakraborty; H. van Essen; J. Verhoeven; M. J. van der Wiel

doi:10.1117/12.949649

6 May 1985 Automatic deposition of multilayer X-ray coatings with laterally graded d-spacing

M. P. Bruijn, P. Chakraborty, H. van Essen, J. Verhoeven, M. J. van der Wiel

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949649
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

A computer controlled e-beam evaporation system is described, which allows fully automated production of soft X-ray reflection coatings with laterally graded d-spacing. Thickness control is done by measurement of the soft X-ray reflection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer controlled movement of shutters. A result is given for automatic deposition of a multilayer coating.

Citation Download Citation

M. P. Bruijn, P. Chakraborty, H. van Essen, J. Verhoeven, and M. J. van der Wiel "Automatic deposition of multilayer X-ray coatings with laterally graded d-spacing", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949649

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