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6 May 1985 F-beam Evaporated Multilayer Soft X-ray Coatings, Analyzed With Cu-Kα Radiation
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Abstract
Results are presented for deposition of multilayer soft X-ray coatings, monitored during deposition with soft X-ray reflection and analyzed afterwards with Cu-Ka reflection. Some calculations on and simulation of non ideal behaviour of multilayer coatings are presented, mainly focussed on roughness problems. Experimental results for e-beam evaporated and sputter-deposited multilayers are compared and a discussion of possible causes for the differences is given.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. P. Bruijn, P. Chakraborty, H. van Essen, J. Verhoeven, M . J. van der Wiel, and W. J. Bartels "F-beam Evaporated Multilayer Soft X-ray Coatings, Analyzed With Cu-Kα Radiation", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949667
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